2/13/2010	1:15:14 PM	Program started after a nonstandard shutdown
2/13/2010	1:15:14 PM	Helium valve closed
2/13/2010	1:15:14 PM	H2 valve closed
2/13/2010	1:15:14 PM	BCl3 valve closed
2/13/2010	1:15:14 PM	PH3 valve closed
2/13/2010	1:15:14 PM	SiCl4 pre valve closed
2/13/2010	1:15:14 PM	SiCl4 post valve closed
2/13/2010	1:15:14 PM	Main Vac valve closed
2/13/2010	1:15:14 PM	Bypass valve closed
2/13/2010	1:15:14 PM	Bubbler valve closed
2/13/2010	1:15:14 PM	Helium MFC set to  0.000000
2/13/2010	1:15:14 PM	H2 MFC set to  0.000000
2/13/2010	1:15:14 PM	BCl3 MFC set to  0.000000
2/13/2010	1:15:14 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:15:14 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	1:15:14 PM	Tube furnace set to 0
2/13/2010	1:15:14 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	1:15:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	1:15:23 PM	H2 valve closed
2/13/2010	1:15:23 PM	BCl3 valve closed
2/13/2010	1:15:23 PM	PH3 valve closed
2/13/2010	1:15:23 PM	SiCl4 pre valve closed
2/13/2010	1:15:23 PM	SiCl4 post valve closed
2/13/2010	1:15:23 PM	Main Vac valve closed
2/13/2010	1:15:23 PM	Bypass valve closed
2/13/2010	1:15:23 PM	Bubbler valve closed
2/13/2010	1:15:23 PM	Helium valve opened
2/13/2010	1:15:23 PM	Helium MFC set to  500.000000
2/13/2010	1:15:23 PM	H2 MFC set to  0.000000
2/13/2010	1:15:23 PM	BCl3 MFC set to  0.000000
2/13/2010	1:15:23 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:15:23 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:15:23 PM	Tube furnace set to 0
2/13/2010	1:15:23 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:16:44 PM	Helium valve closed
2/13/2010	1:16:44 PM	H2 valve closed
2/13/2010	1:16:44 PM	BCl3 valve closed
2/13/2010	1:16:44 PM	PH3 valve closed
2/13/2010	1:16:44 PM	SiCl4 pre valve closed
2/13/2010	1:16:44 PM	SiCl4 post valve closed
2/13/2010	1:16:44 PM	Main Vac valve closed
2/13/2010	1:16:44 PM	Bypass valve closed
2/13/2010	1:16:44 PM	Bubbler valve closed
2/13/2010	1:16:44 PM	Helium MFC set to  0.000000
2/13/2010	1:16:44 PM	H2 MFC set to  0.000000
2/13/2010	1:16:44 PM	BCl3 MFC set to  0.000000
2/13/2010	1:16:44 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:16:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:16:44 PM	Tube furnace set to 0
2/13/2010	1:16:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:16:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	1:21:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	1:21:59 PM	Helium valve closed
2/13/2010	1:21:59 PM	H2 valve closed
2/13/2010	1:21:59 PM	BCl3 valve closed
2/13/2010	1:21:59 PM	PH3 valve closed
2/13/2010	1:21:59 PM	SiCl4 pre valve closed
2/13/2010	1:21:59 PM	SiCl4 post valve closed
2/13/2010	1:21:59 PM	Main Vac valve closed
2/13/2010	1:21:59 PM	Bubbler valve closed
2/13/2010	1:21:59 PM	Bypass valve opened
2/13/2010	1:21:59 PM	Helium MFC set to  0.000000
2/13/2010	1:21:59 PM	H2 MFC set to  0.000000
2/13/2010	1:21:59 PM	BCl3 MFC set to  0.000000
2/13/2010	1:21:59 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:21:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:21:59 PM	Tube furnace set to 0
2/13/2010	1:21:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:22:27 PM	Helium valve closed
2/13/2010	1:22:27 PM	H2 valve closed
2/13/2010	1:22:27 PM	BCl3 valve closed
2/13/2010	1:22:27 PM	PH3 valve closed
2/13/2010	1:22:27 PM	SiCl4 pre valve closed
2/13/2010	1:22:27 PM	SiCl4 post valve closed
2/13/2010	1:22:27 PM	Bubbler valve closed
2/13/2010	1:22:27 PM	Main Vac valve opened
2/13/2010	1:22:27 PM	Bypass valve opened
2/13/2010	1:22:27 PM	Helium MFC set to  0.000000
2/13/2010	1:22:27 PM	H2 MFC set to  0.000000
2/13/2010	1:22:27 PM	BCl3 MFC set to  0.000000
2/13/2010	1:22:27 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:22:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:22:27 PM	Tube furnace set to 0
2/13/2010	1:22:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:22:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	1:23:50 PM	Helium MFC set to  100.000000
2/13/2010	1:23:52 PM	Helium valve opened
2/13/2010	1:25:38 PM	Helium valve closed
2/13/2010	1:25:45 PM	Helium MFC set to  0.000000
2/13/2010	1:26:37 PM	Main Vac valve closed
2/13/2010	1:26:38 PM	Bypass valve closed
2/13/2010	1:27:27 PM	Program started after a nonstandard shutdown
2/13/2010	1:27:27 PM	Helium valve closed
2/13/2010	1:27:27 PM	H2 valve closed
2/13/2010	1:27:27 PM	BCl3 valve closed
2/13/2010	1:27:27 PM	PH3 valve closed
2/13/2010	1:27:27 PM	SiCl4 pre valve closed
2/13/2010	1:27:27 PM	SiCl4 post valve closed
2/13/2010	1:27:27 PM	Main Vac valve closed
2/13/2010	1:27:27 PM	Bypass valve closed
2/13/2010	1:27:27 PM	Bubbler valve closed
2/13/2010	1:27:27 PM	Helium MFC set to  0.000000
2/13/2010	1:27:27 PM	H2 MFC set to  0.000000
2/13/2010	1:27:27 PM	BCl3 MFC set to  0.000000
2/13/2010	1:27:27 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:27:27 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	1:27:27 PM	Tube furnace set to 0
2/13/2010	1:27:27 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	1:27:29 PM	Bypass valve opened
2/13/2010	1:27:29 PM	Main Vac valve opened
2/13/2010	1:28:32 PM	Recipe started at 1:28 PM
2/13/2010	1:28:32 PM	Helium valve closed
2/13/2010	1:28:32 PM	BCl3 valve closed
2/13/2010	1:28:32 PM	PH3 valve closed
2/13/2010	1:28:32 PM	SiCl4 pre valve closed
2/13/2010	1:28:32 PM	SiCl4 post valve closed
2/13/2010	1:28:32 PM	Main Vac valve closed
2/13/2010	1:28:32 PM	Bypass valve closed
2/13/2010	1:28:32 PM	Bubbler valve closed
2/13/2010	1:28:32 PM	H2 valve opened
2/13/2010	1:28:32 PM	Helium MFC set to  0.000000
2/13/2010	1:28:32 PM	H2 MFC set to  500.000000
2/13/2010	1:28:32 PM	BCl3 MFC set to  0.000000
2/13/2010	1:28:32 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:28:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:28:32 PM	Tube furnace set to 0
2/13/2010	1:28:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:29:55 PM	Helium valve closed
2/13/2010	1:29:55 PM	BCl3 valve closed
2/13/2010	1:29:55 PM	PH3 valve closed
2/13/2010	1:29:55 PM	SiCl4 pre valve closed
2/13/2010	1:29:55 PM	SiCl4 post valve closed
2/13/2010	1:29:55 PM	Main Vac valve closed
2/13/2010	1:29:55 PM	Bypass valve closed
2/13/2010	1:29:55 PM	H2 valve opened
2/13/2010	1:29:55 PM	Bubbler valve opened
2/13/2010	1:29:55 PM	Helium MFC set to  0.000000
2/13/2010	1:29:55 PM	H2 MFC set to  500.000000
2/13/2010	1:29:55 PM	BCl3 MFC set to  0.000000
2/13/2010	1:29:55 PM	SiCl4 MFC set to  0.000000
2/13/2010	1:29:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:29:55 PM	Tube furnace set to 0
2/13/2010	1:29:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:49:56 PM	Helium valve closed
2/13/2010	1:49:56 PM	BCl3 valve closed
2/13/2010	1:49:56 PM	PH3 valve closed
2/13/2010	1:49:56 PM	Main Vac valve closed
2/13/2010	1:49:56 PM	Bypass valve closed
2/13/2010	1:49:56 PM	H2 valve opened
2/13/2010	1:49:56 PM	SiCl4 pre valve opened
2/13/2010	1:49:56 PM	SiCl4 post valve opened
2/13/2010	1:49:56 PM	Bubbler valve opened
2/13/2010	1:49:56 PM	Helium MFC set to  0.000000
2/13/2010	1:49:56 PM	H2 MFC set to  500.000000
2/13/2010	1:49:56 PM	BCl3 MFC set to  0.000000
2/13/2010	1:49:56 PM	SiCl4 MFC set to  325.000000
2/13/2010	1:49:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	1:49:56 PM	Tube furnace set to 0
2/13/2010	1:49:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:09:56 PM	H2 valve closed
2/13/2010	2:09:56 PM	BCl3 valve closed
2/13/2010	2:09:56 PM	PH3 valve closed
2/13/2010	2:09:56 PM	SiCl4 pre valve closed
2/13/2010	2:09:56 PM	SiCl4 post valve closed
2/13/2010	2:09:56 PM	Main Vac valve closed
2/13/2010	2:09:56 PM	Bypass valve closed
2/13/2010	2:09:56 PM	Helium valve opened
2/13/2010	2:09:56 PM	Bubbler valve opened
2/13/2010	2:09:56 PM	Helium MFC set to  500.000000
2/13/2010	2:09:56 PM	H2 MFC set to  0.000000
2/13/2010	2:09:56 PM	BCl3 MFC set to  0.000000
2/13/2010	2:09:56 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:09:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:09:56 PM	Tube furnace set to 0
2/13/2010	2:09:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:29:57 PM	Helium valve closed
2/13/2010	2:29:57 PM	H2 valve closed
2/13/2010	2:29:57 PM	BCl3 valve closed
2/13/2010	2:29:57 PM	PH3 valve closed
2/13/2010	2:29:57 PM	SiCl4 pre valve closed
2/13/2010	2:29:57 PM	SiCl4 post valve closed
2/13/2010	2:29:57 PM	Main Vac valve closed
2/13/2010	2:29:57 PM	Bypass valve closed
2/13/2010	2:29:57 PM	Bubbler valve closed
2/13/2010	2:29:57 PM	Helium MFC set to  0.000000
2/13/2010	2:29:57 PM	H2 MFC set to  0.000000
2/13/2010	2:29:57 PM	BCl3 MFC set to  0.000000
2/13/2010	2:29:57 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:29:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:29:57 PM	Tube furnace set to 0
2/13/2010	2:29:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:29:57 PM	Run finished at 2:29 PM
2/13/2010	2:31:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:31:43 PM	H2 valve closed
2/13/2010	2:31:43 PM	BCl3 valve closed
2/13/2010	2:31:43 PM	PH3 valve closed
2/13/2010	2:31:43 PM	SiCl4 pre valve closed
2/13/2010	2:31:43 PM	SiCl4 post valve closed
2/13/2010	2:31:43 PM	Main Vac valve closed
2/13/2010	2:31:43 PM	Bypass valve closed
2/13/2010	2:31:43 PM	Bubbler valve closed
2/13/2010	2:31:43 PM	Helium valve opened
2/13/2010	2:31:43 PM	Helium MFC set to  500.000000
2/13/2010	2:31:43 PM	H2 MFC set to  0.000000
2/13/2010	2:31:43 PM	BCl3 MFC set to  0.000000
2/13/2010	2:31:43 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:31:43 PM	Tube furnace set to 0
2/13/2010	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:31:43 PM	Helium valve closed
2/13/2010	2:31:43 PM	H2 valve closed
2/13/2010	2:31:43 PM	BCl3 valve closed
2/13/2010	2:31:43 PM	PH3 valve closed
2/13/2010	2:31:43 PM	SiCl4 pre valve closed
2/13/2010	2:31:43 PM	SiCl4 post valve closed
2/13/2010	2:31:43 PM	Main Vac valve closed
2/13/2010	2:31:43 PM	Bypass valve closed
2/13/2010	2:31:43 PM	Bubbler valve closed
2/13/2010	2:31:43 PM	Helium MFC set to  0.000000
2/13/2010	2:31:43 PM	H2 MFC set to  0.000000
2/13/2010	2:31:43 PM	BCl3 MFC set to  0.000000
2/13/2010	2:31:43 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:31:43 PM	Tube furnace set to 0
2/13/2010	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:31:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:31:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	2:31:50 PM	Helium valve closed
2/13/2010	2:31:50 PM	H2 valve closed
2/13/2010	2:31:50 PM	BCl3 valve closed
2/13/2010	2:31:50 PM	PH3 valve closed
2/13/2010	2:31:50 PM	SiCl4 pre valve closed
2/13/2010	2:31:50 PM	SiCl4 post valve closed
2/13/2010	2:31:50 PM	Main Vac valve closed
2/13/2010	2:31:50 PM	Bubbler valve closed
2/13/2010	2:31:50 PM	Bypass valve opened
2/13/2010	2:31:50 PM	Helium MFC set to  0.000000
2/13/2010	2:31:50 PM	H2 MFC set to  0.000000
2/13/2010	2:31:50 PM	BCl3 MFC set to  0.000000
2/13/2010	2:31:50 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:31:50 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:31:50 PM	Tube furnace set to 0
2/13/2010	2:31:50 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:32:11 PM	Helium valve closed
2/13/2010	2:32:11 PM	H2 valve closed
2/13/2010	2:32:11 PM	BCl3 valve closed
2/13/2010	2:32:11 PM	PH3 valve closed
2/13/2010	2:32:11 PM	SiCl4 pre valve closed
2/13/2010	2:32:11 PM	SiCl4 post valve closed
2/13/2010	2:32:11 PM	Bubbler valve closed
2/13/2010	2:32:11 PM	Main Vac valve opened
2/13/2010	2:32:11 PM	Bypass valve opened
2/13/2010	2:32:11 PM	Helium MFC set to  0.000000
2/13/2010	2:32:11 PM	H2 MFC set to  0.000000
2/13/2010	2:32:11 PM	BCl3 MFC set to  0.000000
2/13/2010	2:32:11 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:32:11 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:32:11 PM	Tube furnace set to 0
2/13/2010	2:32:11 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:32:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	2:32:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:32:21 PM	H2 valve closed
2/13/2010	2:32:21 PM	BCl3 valve closed
2/13/2010	2:32:21 PM	PH3 valve closed
2/13/2010	2:32:21 PM	SiCl4 pre valve closed
2/13/2010	2:32:21 PM	SiCl4 post valve closed
2/13/2010	2:32:21 PM	Main Vac valve closed
2/13/2010	2:32:21 PM	Bypass valve closed
2/13/2010	2:32:21 PM	Bubbler valve closed
2/13/2010	2:32:21 PM	Helium valve opened
2/13/2010	2:32:21 PM	Helium MFC set to  500.000000
2/13/2010	2:32:21 PM	H2 MFC set to  0.000000
2/13/2010	2:32:21 PM	BCl3 MFC set to  0.000000
2/13/2010	2:32:21 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:32:21 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:32:21 PM	Tube furnace set to 0
2/13/2010	2:32:21 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:33:41 PM	Helium valve closed
2/13/2010	2:33:41 PM	H2 valve closed
2/13/2010	2:33:41 PM	BCl3 valve closed
2/13/2010	2:33:41 PM	PH3 valve closed
2/13/2010	2:33:41 PM	SiCl4 pre valve closed
2/13/2010	2:33:41 PM	SiCl4 post valve closed
2/13/2010	2:33:41 PM	Main Vac valve closed
2/13/2010	2:33:41 PM	Bypass valve closed
2/13/2010	2:33:41 PM	Bubbler valve closed
2/13/2010	2:33:41 PM	Helium MFC set to  0.000000
2/13/2010	2:33:41 PM	H2 MFC set to  0.000000
2/13/2010	2:33:41 PM	BCl3 MFC set to  0.000000
2/13/2010	2:33:41 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:33:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:33:41 PM	Tube furnace set to 0
2/13/2010	2:33:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:33:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:42:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:42:27 PM	H2 valve closed
2/13/2010	2:42:27 PM	BCl3 valve closed
2/13/2010	2:42:27 PM	PH3 valve closed
2/13/2010	2:42:27 PM	SiCl4 pre valve closed
2/13/2010	2:42:27 PM	SiCl4 post valve closed
2/13/2010	2:42:27 PM	Main Vac valve closed
2/13/2010	2:42:27 PM	Bypass valve closed
2/13/2010	2:42:27 PM	Bubbler valve closed
2/13/2010	2:42:27 PM	Helium valve opened
2/13/2010	2:42:27 PM	Helium MFC set to  500.000000
2/13/2010	2:42:27 PM	H2 MFC set to  0.000000
2/13/2010	2:42:27 PM	BCl3 MFC set to  0.000000
2/13/2010	2:42:27 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:42:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:42:27 PM	Tube furnace set to 0
2/13/2010	2:42:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:42:29 PM	Helium valve closed
2/13/2010	2:42:29 PM	H2 valve closed
2/13/2010	2:42:29 PM	BCl3 valve closed
2/13/2010	2:42:29 PM	PH3 valve closed
2/13/2010	2:42:29 PM	SiCl4 pre valve closed
2/13/2010	2:42:29 PM	SiCl4 post valve closed
2/13/2010	2:42:29 PM	Main Vac valve closed
2/13/2010	2:42:29 PM	Bypass valve closed
2/13/2010	2:42:29 PM	Bubbler valve closed
2/13/2010	2:42:29 PM	Helium MFC set to  0.000000
2/13/2010	2:42:29 PM	H2 MFC set to  0.000000
2/13/2010	2:42:29 PM	BCl3 MFC set to  0.000000
2/13/2010	2:42:29 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:42:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:42:29 PM	Tube furnace set to 0
2/13/2010	2:42:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:42:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	2:42:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	2:42:34 PM	Helium valve closed
2/13/2010	2:42:34 PM	H2 valve closed
2/13/2010	2:42:34 PM	BCl3 valve closed
2/13/2010	2:42:34 PM	PH3 valve closed
2/13/2010	2:42:34 PM	SiCl4 pre valve closed
2/13/2010	2:42:34 PM	SiCl4 post valve closed
2/13/2010	2:42:34 PM	Main Vac valve closed
2/13/2010	2:42:34 PM	Bubbler valve closed
2/13/2010	2:42:34 PM	Bypass valve opened
2/13/2010	2:42:34 PM	Helium MFC set to  0.000000
2/13/2010	2:42:34 PM	H2 MFC set to  0.000000
2/13/2010	2:42:34 PM	BCl3 MFC set to  0.000000
2/13/2010	2:42:34 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:42:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:42:34 PM	Tube furnace set to 0
2/13/2010	2:42:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:43:02 PM	Helium valve closed
2/13/2010	2:43:02 PM	H2 valve closed
2/13/2010	2:43:02 PM	BCl3 valve closed
2/13/2010	2:43:02 PM	PH3 valve closed
2/13/2010	2:43:02 PM	SiCl4 pre valve closed
2/13/2010	2:43:02 PM	SiCl4 post valve closed
2/13/2010	2:43:02 PM	Bubbler valve closed
2/13/2010	2:43:02 PM	Main Vac valve opened
2/13/2010	2:43:02 PM	Bypass valve opened
2/13/2010	2:43:02 PM	Helium MFC set to  0.000000
2/13/2010	2:43:02 PM	H2 MFC set to  0.000000
2/13/2010	2:43:02 PM	BCl3 MFC set to  0.000000
2/13/2010	2:43:02 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:43:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:43:02 PM	Tube furnace set to 0
2/13/2010	2:43:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:43:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	2:47:16 PM	Helium MFC set to  100.000000
2/13/2010	2:47:16 PM	Helium valve opened
2/13/2010	2:48:06 PM	Helium MFC set to  0.000000
2/13/2010	2:48:07 PM	Helium valve closed
2/13/2010	2:49:25 PM	Main Vac valve closed
2/13/2010	2:49:27 PM	Bypass valve closed
2/13/2010	2:49:44 PM	Bypass valve opened
2/13/2010	2:49:46 PM	Main Vac valve opened
2/13/2010	2:51:23 PM	Main Vac valve closed
2/13/2010	2:51:24 PM	Bypass valve closed
2/13/2010	2:51:38 PM	Bypass valve opened
2/13/2010	2:51:40 PM	Main Vac valve opened
2/13/2010	2:52:19 PM	Recipe started at 2:52 PM
2/13/2010	2:52:19 PM	Helium valve closed
2/13/2010	2:52:19 PM	BCl3 valve closed
2/13/2010	2:52:19 PM	PH3 valve closed
2/13/2010	2:52:19 PM	SiCl4 pre valve closed
2/13/2010	2:52:19 PM	SiCl4 post valve closed
2/13/2010	2:52:19 PM	Main Vac valve closed
2/13/2010	2:52:19 PM	Bypass valve closed
2/13/2010	2:52:19 PM	Bubbler valve closed
2/13/2010	2:52:19 PM	H2 valve opened
2/13/2010	2:52:19 PM	Helium MFC set to  0.000000
2/13/2010	2:52:19 PM	H2 MFC set to  500.000000
2/13/2010	2:52:19 PM	BCl3 MFC set to  0.000000
2/13/2010	2:52:19 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:52:19 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:52:19 PM	Tube furnace set to 0
2/13/2010	2:52:19 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:53:39 PM	Helium valve closed
2/13/2010	2:53:39 PM	BCl3 valve closed
2/13/2010	2:53:39 PM	PH3 valve closed
2/13/2010	2:53:39 PM	SiCl4 pre valve closed
2/13/2010	2:53:39 PM	SiCl4 post valve closed
2/13/2010	2:53:39 PM	Main Vac valve closed
2/13/2010	2:53:39 PM	Bypass valve closed
2/13/2010	2:53:39 PM	H2 valve opened
2/13/2010	2:53:39 PM	Bubbler valve opened
2/13/2010	2:53:39 PM	Helium MFC set to  0.000000
2/13/2010	2:53:39 PM	H2 MFC set to  500.000000
2/13/2010	2:53:39 PM	BCl3 MFC set to  0.000000
2/13/2010	2:53:39 PM	SiCl4 MFC set to  0.000000
2/13/2010	2:53:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	2:53:39 PM	Tube furnace set to 0
2/13/2010	2:53:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:13:39 PM	Helium valve closed
2/13/2010	3:13:39 PM	BCl3 valve closed
2/13/2010	3:13:39 PM	PH3 valve closed
2/13/2010	3:13:39 PM	Main Vac valve closed
2/13/2010	3:13:39 PM	Bypass valve closed
2/13/2010	3:13:39 PM	H2 valve opened
2/13/2010	3:13:39 PM	SiCl4 pre valve opened
2/13/2010	3:13:39 PM	SiCl4 post valve opened
2/13/2010	3:13:39 PM	Bubbler valve opened
2/13/2010	3:13:39 PM	Helium MFC set to  0.000000
2/13/2010	3:13:39 PM	H2 MFC set to  500.000000
2/13/2010	3:13:39 PM	BCl3 MFC set to  0.000000
2/13/2010	3:13:39 PM	SiCl4 MFC set to  325.000000
2/13/2010	3:13:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:13:39 PM	Tube furnace set to 0
2/13/2010	3:13:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:33:40 PM	H2 valve closed
2/13/2010	3:33:40 PM	BCl3 valve closed
2/13/2010	3:33:40 PM	PH3 valve closed
2/13/2010	3:33:40 PM	SiCl4 pre valve closed
2/13/2010	3:33:40 PM	SiCl4 post valve closed
2/13/2010	3:33:40 PM	Main Vac valve closed
2/13/2010	3:33:40 PM	Bypass valve closed
2/13/2010	3:33:40 PM	Helium valve opened
2/13/2010	3:33:40 PM	Bubbler valve opened
2/13/2010	3:33:40 PM	Helium MFC set to  500.000000
2/13/2010	3:33:40 PM	H2 MFC set to  0.000000
2/13/2010	3:33:40 PM	BCl3 MFC set to  0.000000
2/13/2010	3:33:40 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:33:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:33:40 PM	Tube furnace set to 0
2/13/2010	3:33:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:53:40 PM	Helium valve closed
2/13/2010	3:53:40 PM	H2 valve closed
2/13/2010	3:53:40 PM	BCl3 valve closed
2/13/2010	3:53:40 PM	PH3 valve closed
2/13/2010	3:53:40 PM	SiCl4 pre valve closed
2/13/2010	3:53:40 PM	SiCl4 post valve closed
2/13/2010	3:53:40 PM	Main Vac valve closed
2/13/2010	3:53:40 PM	Bypass valve closed
2/13/2010	3:53:40 PM	Bubbler valve closed
2/13/2010	3:53:40 PM	Helium MFC set to  0.000000
2/13/2010	3:53:40 PM	H2 MFC set to  0.000000
2/13/2010	3:53:40 PM	BCl3 MFC set to  0.000000
2/13/2010	3:53:40 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:53:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:53:40 PM	Tube furnace set to 0
2/13/2010	3:53:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:53:41 PM	Run finished at 3:53 PM
2/13/2010	3:53:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	3:53:54 PM	Helium valve closed
2/13/2010	3:53:54 PM	H2 valve closed
2/13/2010	3:53:54 PM	BCl3 valve closed
2/13/2010	3:53:54 PM	PH3 valve closed
2/13/2010	3:53:54 PM	SiCl4 pre valve closed
2/13/2010	3:53:54 PM	SiCl4 post valve closed
2/13/2010	3:53:54 PM	Main Vac valve closed
2/13/2010	3:53:54 PM	Bubbler valve closed
2/13/2010	3:53:54 PM	Bypass valve opened
2/13/2010	3:53:54 PM	Helium MFC set to  0.000000
2/13/2010	3:53:54 PM	H2 MFC set to  0.000000
2/13/2010	3:53:54 PM	BCl3 MFC set to  0.000000
2/13/2010	3:53:54 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:53:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:53:54 PM	Tube furnace set to 0
2/13/2010	3:53:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:54:15 PM	Helium valve closed
2/13/2010	3:54:15 PM	H2 valve closed
2/13/2010	3:54:15 PM	BCl3 valve closed
2/13/2010	3:54:15 PM	PH3 valve closed
2/13/2010	3:54:15 PM	SiCl4 pre valve closed
2/13/2010	3:54:15 PM	SiCl4 post valve closed
2/13/2010	3:54:15 PM	Bubbler valve closed
2/13/2010	3:54:15 PM	Main Vac valve opened
2/13/2010	3:54:15 PM	Bypass valve opened
2/13/2010	3:54:15 PM	Helium MFC set to  0.000000
2/13/2010	3:54:15 PM	H2 MFC set to  0.000000
2/13/2010	3:54:15 PM	BCl3 MFC set to  0.000000
2/13/2010	3:54:15 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:54:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:54:15 PM	Tube furnace set to 0
2/13/2010	3:54:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:54:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	3:54:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	3:54:28 PM	H2 valve closed
2/13/2010	3:54:28 PM	BCl3 valve closed
2/13/2010	3:54:28 PM	PH3 valve closed
2/13/2010	3:54:28 PM	SiCl4 pre valve closed
2/13/2010	3:54:28 PM	SiCl4 post valve closed
2/13/2010	3:54:28 PM	Main Vac valve closed
2/13/2010	3:54:28 PM	Bypass valve closed
2/13/2010	3:54:28 PM	Bubbler valve closed
2/13/2010	3:54:28 PM	Helium valve opened
2/13/2010	3:54:28 PM	Helium MFC set to  500.000000
2/13/2010	3:54:28 PM	H2 MFC set to  0.000000
2/13/2010	3:54:28 PM	BCl3 MFC set to  0.000000
2/13/2010	3:54:28 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:54:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:54:28 PM	Tube furnace set to 0
2/13/2010	3:54:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:55:47 PM	Helium valve closed
2/13/2010	3:55:47 PM	H2 valve closed
2/13/2010	3:55:47 PM	BCl3 valve closed
2/13/2010	3:55:47 PM	PH3 valve closed
2/13/2010	3:55:47 PM	SiCl4 pre valve closed
2/13/2010	3:55:47 PM	SiCl4 post valve closed
2/13/2010	3:55:47 PM	Main Vac valve closed
2/13/2010	3:55:47 PM	Bypass valve closed
2/13/2010	3:55:47 PM	Bubbler valve closed
2/13/2010	3:55:47 PM	Helium MFC set to  0.000000
2/13/2010	3:55:47 PM	H2 MFC set to  0.000000
2/13/2010	3:55:47 PM	BCl3 MFC set to  0.000000
2/13/2010	3:55:47 PM	SiCl4 MFC set to  0.000000
2/13/2010	3:55:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:55:47 PM	Tube furnace set to 0
2/13/2010	3:55:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	3:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:04:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:04:34 PM	Helium valve closed
2/13/2010	4:04:34 PM	H2 valve closed
2/13/2010	4:04:34 PM	BCl3 valve closed
2/13/2010	4:04:34 PM	PH3 valve closed
2/13/2010	4:04:34 PM	SiCl4 pre valve closed
2/13/2010	4:04:34 PM	SiCl4 post valve closed
2/13/2010	4:04:34 PM	Main Vac valve closed
2/13/2010	4:04:34 PM	Bubbler valve closed
2/13/2010	4:04:34 PM	Bypass valve opened
2/13/2010	4:04:34 PM	Helium MFC set to  0.000000
2/13/2010	4:04:34 PM	H2 MFC set to  0.000000
2/13/2010	4:04:34 PM	BCl3 MFC set to  0.000000
2/13/2010	4:04:34 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:04:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:04:34 PM	Tube furnace set to 0
2/13/2010	4:04:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:05:02 PM	Helium valve closed
2/13/2010	4:05:02 PM	H2 valve closed
2/13/2010	4:05:02 PM	BCl3 valve closed
2/13/2010	4:05:02 PM	PH3 valve closed
2/13/2010	4:05:02 PM	SiCl4 pre valve closed
2/13/2010	4:05:02 PM	SiCl4 post valve closed
2/13/2010	4:05:02 PM	Bubbler valve closed
2/13/2010	4:05:02 PM	Main Vac valve opened
2/13/2010	4:05:02 PM	Bypass valve opened
2/13/2010	4:05:02 PM	Helium MFC set to  0.000000
2/13/2010	4:05:02 PM	H2 MFC set to  0.000000
2/13/2010	4:05:02 PM	BCl3 MFC set to  0.000000
2/13/2010	4:05:02 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:05:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:05:02 PM	Tube furnace set to 0
2/13/2010	4:05:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:05:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:27:35 PM	Helium MFC set to  100.000000
2/13/2010	4:27:36 PM	Helium valve opened
2/13/2010	4:28:25 PM	Helium MFC set to  0.000000
2/13/2010	4:28:26 PM	Helium valve closed
2/13/2010	4:29:01 PM	Helium MFC set to  100.000000
2/13/2010	4:29:02 PM	Helium valve opened
2/13/2010	4:31:29 PM	Helium MFC set to  0.000000
2/13/2010	4:31:29 PM	Helium valve closed
2/13/2010	4:32:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:32:13 PM	H2 valve closed
2/13/2010	4:32:13 PM	BCl3 valve closed
2/13/2010	4:32:13 PM	PH3 valve closed
2/13/2010	4:32:13 PM	SiCl4 pre valve closed
2/13/2010	4:32:13 PM	SiCl4 post valve closed
2/13/2010	4:32:13 PM	Main Vac valve closed
2/13/2010	4:32:13 PM	Bypass valve closed
2/13/2010	4:32:13 PM	Bubbler valve closed
2/13/2010	4:32:13 PM	Helium valve opened
2/13/2010	4:32:13 PM	Helium MFC set to  500.000000
2/13/2010	4:32:13 PM	H2 MFC set to  0.000000
2/13/2010	4:32:13 PM	BCl3 MFC set to  0.000000
2/13/2010	4:32:13 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:32:13 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:32:13 PM	Tube furnace set to 0
2/13/2010	4:32:13 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:33:35 PM	Helium valve closed
2/13/2010	4:33:35 PM	H2 valve closed
2/13/2010	4:33:35 PM	BCl3 valve closed
2/13/2010	4:33:35 PM	PH3 valve closed
2/13/2010	4:33:35 PM	SiCl4 pre valve closed
2/13/2010	4:33:35 PM	SiCl4 post valve closed
2/13/2010	4:33:35 PM	Main Vac valve closed
2/13/2010	4:33:35 PM	Bypass valve closed
2/13/2010	4:33:35 PM	Bubbler valve closed
2/13/2010	4:33:35 PM	Helium MFC set to  0.000000
2/13/2010	4:33:35 PM	H2 MFC set to  0.000000
2/13/2010	4:33:35 PM	BCl3 MFC set to  0.000000
2/13/2010	4:33:35 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:33:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:33:35 PM	Tube furnace set to 0
2/13/2010	4:33:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:33:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:36:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:36:48 PM	Helium valve closed
2/13/2010	4:36:48 PM	H2 valve closed
2/13/2010	4:36:48 PM	BCl3 valve closed
2/13/2010	4:36:48 PM	PH3 valve closed
2/13/2010	4:36:48 PM	SiCl4 pre valve closed
2/13/2010	4:36:48 PM	SiCl4 post valve closed
2/13/2010	4:36:48 PM	Main Vac valve closed
2/13/2010	4:36:48 PM	Bubbler valve closed
2/13/2010	4:36:48 PM	Bypass valve opened
2/13/2010	4:36:48 PM	Helium MFC set to  0.000000
2/13/2010	4:36:48 PM	H2 MFC set to  0.000000
2/13/2010	4:36:48 PM	BCl3 MFC set to  0.000000
2/13/2010	4:36:48 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:36:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:36:48 PM	Tube furnace set to 0
2/13/2010	4:36:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:37:15 PM	Helium valve closed
2/13/2010	4:37:15 PM	H2 valve closed
2/13/2010	4:37:15 PM	BCl3 valve closed
2/13/2010	4:37:15 PM	PH3 valve closed
2/13/2010	4:37:15 PM	SiCl4 pre valve closed
2/13/2010	4:37:15 PM	SiCl4 post valve closed
2/13/2010	4:37:15 PM	Bubbler valve closed
2/13/2010	4:37:15 PM	Main Vac valve opened
2/13/2010	4:37:15 PM	Bypass valve opened
2/13/2010	4:37:15 PM	Helium MFC set to  0.000000
2/13/2010	4:37:15 PM	H2 MFC set to  0.000000
2/13/2010	4:37:15 PM	BCl3 MFC set to  0.000000
2/13/2010	4:37:15 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:37:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:37:15 PM	Tube furnace set to 0
2/13/2010	4:37:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:37:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:38:39 PM	Helium MFC set to  100.000000
2/13/2010	4:38:40 PM	Helium valve opened
2/13/2010	4:40:15 PM	Helium MFC set to  0.000000
2/13/2010	4:40:16 PM	Helium valve closed
2/13/2010	4:41:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:41:13 PM	H2 valve closed
2/13/2010	4:41:13 PM	BCl3 valve closed
2/13/2010	4:41:13 PM	PH3 valve closed
2/13/2010	4:41:13 PM	SiCl4 pre valve closed
2/13/2010	4:41:13 PM	SiCl4 post valve closed
2/13/2010	4:41:13 PM	Main Vac valve closed
2/13/2010	4:41:13 PM	Bypass valve closed
2/13/2010	4:41:13 PM	Bubbler valve closed
2/13/2010	4:41:13 PM	Helium valve opened
2/13/2010	4:41:13 PM	Helium MFC set to  500.000000
2/13/2010	4:41:13 PM	H2 MFC set to  0.000000
2/13/2010	4:41:13 PM	BCl3 MFC set to  0.000000
2/13/2010	4:41:13 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:41:13 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:41:13 PM	Tube furnace set to 0
2/13/2010	4:41:13 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:49:02 PM	Helium valve closed
2/13/2010	4:49:02 PM	H2 valve closed
2/13/2010	4:49:02 PM	BCl3 valve closed
2/13/2010	4:49:02 PM	PH3 valve closed
2/13/2010	4:49:02 PM	SiCl4 pre valve closed
2/13/2010	4:49:02 PM	SiCl4 post valve closed
2/13/2010	4:49:02 PM	Main Vac valve closed
2/13/2010	4:49:02 PM	Bypass valve closed
2/13/2010	4:49:02 PM	Bubbler valve closed
2/13/2010	4:49:02 PM	Helium MFC set to  0.000000
2/13/2010	4:49:02 PM	H2 MFC set to  0.000000
2/13/2010	4:49:02 PM	BCl3 MFC set to  0.000000
2/13/2010	4:49:02 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:49:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:49:02 PM	Tube furnace set to 0
2/13/2010	4:49:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:49:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:49:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:49:39 PM	Helium valve closed
2/13/2010	4:49:39 PM	H2 valve closed
2/13/2010	4:49:39 PM	BCl3 valve closed
2/13/2010	4:49:39 PM	PH3 valve closed
2/13/2010	4:49:39 PM	SiCl4 pre valve closed
2/13/2010	4:49:39 PM	SiCl4 post valve closed
2/13/2010	4:49:39 PM	Main Vac valve closed
2/13/2010	4:49:39 PM	Bubbler valve closed
2/13/2010	4:49:39 PM	Bypass valve opened
2/13/2010	4:49:39 PM	Helium MFC set to  0.000000
2/13/2010	4:49:39 PM	H2 MFC set to  0.000000
2/13/2010	4:49:39 PM	BCl3 MFC set to  0.000000
2/13/2010	4:49:39 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:49:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:49:39 PM	Tube furnace set to 0
2/13/2010	4:49:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:50:02 PM	Helium valve closed
2/13/2010	4:50:02 PM	H2 valve closed
2/13/2010	4:50:02 PM	BCl3 valve closed
2/13/2010	4:50:02 PM	PH3 valve closed
2/13/2010	4:50:02 PM	SiCl4 pre valve closed
2/13/2010	4:50:02 PM	SiCl4 post valve closed
2/13/2010	4:50:02 PM	Bubbler valve closed
2/13/2010	4:50:02 PM	Main Vac valve opened
2/13/2010	4:50:02 PM	Bypass valve opened
2/13/2010	4:50:02 PM	Helium MFC set to  0.000000
2/13/2010	4:50:02 PM	H2 MFC set to  0.000000
2/13/2010	4:50:02 PM	BCl3 MFC set to  0.000000
2/13/2010	4:50:02 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:50:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:50:02 PM	Tube furnace set to 0
2/13/2010	4:50:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:50:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	4:54:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	4:54:32 PM	H2 valve closed
2/13/2010	4:54:32 PM	BCl3 valve closed
2/13/2010	4:54:32 PM	PH3 valve closed
2/13/2010	4:54:32 PM	SiCl4 pre valve closed
2/13/2010	4:54:32 PM	SiCl4 post valve closed
2/13/2010	4:54:32 PM	Main Vac valve closed
2/13/2010	4:54:32 PM	Bypass valve closed
2/13/2010	4:54:32 PM	Bubbler valve closed
2/13/2010	4:54:32 PM	Helium valve opened
2/13/2010	4:54:32 PM	Helium MFC set to  500.000000
2/13/2010	4:54:32 PM	H2 MFC set to  0.000000
2/13/2010	4:54:32 PM	BCl3 MFC set to  0.000000
2/13/2010	4:54:32 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:54:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:54:32 PM	Tube furnace set to 0
2/13/2010	4:54:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:55:54 PM	Helium valve closed
2/13/2010	4:55:54 PM	H2 valve closed
2/13/2010	4:55:54 PM	BCl3 valve closed
2/13/2010	4:55:54 PM	PH3 valve closed
2/13/2010	4:55:54 PM	SiCl4 pre valve closed
2/13/2010	4:55:54 PM	SiCl4 post valve closed
2/13/2010	4:55:54 PM	Main Vac valve closed
2/13/2010	4:55:54 PM	Bypass valve closed
2/13/2010	4:55:54 PM	Bubbler valve closed
2/13/2010	4:55:54 PM	Helium MFC set to  0.000000
2/13/2010	4:55:54 PM	H2 MFC set to  0.000000
2/13/2010	4:55:54 PM	BCl3 MFC set to  0.000000
2/13/2010	4:55:54 PM	SiCl4 MFC set to  0.000000
2/13/2010	4:55:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:55:54 PM	Tube furnace set to 0
2/13/2010	4:55:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	4:55:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	5:05:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:05:09 PM	Helium valve closed
2/13/2010	5:05:09 PM	H2 valve closed
2/13/2010	5:05:09 PM	BCl3 valve closed
2/13/2010	5:05:09 PM	PH3 valve closed
2/13/2010	5:05:09 PM	SiCl4 pre valve closed
2/13/2010	5:05:09 PM	SiCl4 post valve closed
2/13/2010	5:05:09 PM	Main Vac valve closed
2/13/2010	5:05:09 PM	Bubbler valve closed
2/13/2010	5:05:09 PM	Bypass valve opened
2/13/2010	5:05:09 PM	Helium MFC set to  0.000000
2/13/2010	5:05:09 PM	H2 MFC set to  0.000000
2/13/2010	5:05:09 PM	BCl3 MFC set to  0.000000
2/13/2010	5:05:09 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:05:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:05:09 PM	Tube furnace set to 0
2/13/2010	5:05:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:05:37 PM	Helium valve closed
2/13/2010	5:05:37 PM	H2 valve closed
2/13/2010	5:05:37 PM	BCl3 valve closed
2/13/2010	5:05:37 PM	PH3 valve closed
2/13/2010	5:05:37 PM	SiCl4 pre valve closed
2/13/2010	5:05:37 PM	SiCl4 post valve closed
2/13/2010	5:05:37 PM	Bubbler valve closed
2/13/2010	5:05:37 PM	Main Vac valve opened
2/13/2010	5:05:37 PM	Bypass valve opened
2/13/2010	5:05:37 PM	Helium MFC set to  0.000000
2/13/2010	5:05:37 PM	H2 MFC set to  0.000000
2/13/2010	5:05:37 PM	BCl3 MFC set to  0.000000
2/13/2010	5:05:37 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:05:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:05:37 PM	Tube furnace set to 0
2/13/2010	5:05:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:05:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:06:26 PM	Helium MFC set to  100.000000
2/13/2010	5:06:26 PM	Helium valve opened
2/13/2010	5:08:50 PM	Helium MFC set to  0.000000
2/13/2010	5:08:51 PM	Helium valve closed
2/13/2010	5:12:29 PM	Main Vac valve closed
2/13/2010	5:12:30 PM	Bypass valve closed
2/13/2010	5:12:37 PM	Bypass valve opened
2/13/2010	5:12:38 PM	Main Vac valve opened
2/13/2010	5:16:42 PM	Bypass valve closed
2/13/2010	5:16:42 PM	Main Vac valve closed
2/13/2010	5:17:07 PM	Bypass valve opened
2/13/2010	5:17:08 PM	Bypass valve closed
2/13/2010	5:17:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	5:17:16 PM	H2 valve closed
2/13/2010	5:17:16 PM	BCl3 valve closed
2/13/2010	5:17:16 PM	PH3 valve closed
2/13/2010	5:17:16 PM	SiCl4 pre valve closed
2/13/2010	5:17:16 PM	SiCl4 post valve closed
2/13/2010	5:17:16 PM	Main Vac valve closed
2/13/2010	5:17:16 PM	Bypass valve closed
2/13/2010	5:17:16 PM	Bubbler valve closed
2/13/2010	5:17:16 PM	Helium valve opened
2/13/2010	5:17:16 PM	Helium MFC set to  500.000000
2/13/2010	5:17:16 PM	H2 MFC set to  0.000000
2/13/2010	5:17:16 PM	BCl3 MFC set to  0.000000
2/13/2010	5:17:16 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:17:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:17:17 PM	Tube furnace set to 0
2/13/2010	5:17:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:18:38 PM	Helium valve closed
2/13/2010	5:18:38 PM	H2 valve closed
2/13/2010	5:18:38 PM	BCl3 valve closed
2/13/2010	5:18:38 PM	PH3 valve closed
2/13/2010	5:18:38 PM	SiCl4 pre valve closed
2/13/2010	5:18:38 PM	SiCl4 post valve closed
2/13/2010	5:18:38 PM	Main Vac valve closed
2/13/2010	5:18:38 PM	Bypass valve closed
2/13/2010	5:18:38 PM	Bubbler valve closed
2/13/2010	5:18:38 PM	Helium MFC set to  0.000000
2/13/2010	5:18:38 PM	H2 MFC set to  0.000000
2/13/2010	5:18:38 PM	BCl3 MFC set to  0.000000
2/13/2010	5:18:38 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:18:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:18:38 PM	Tube furnace set to 0
2/13/2010	5:18:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:18:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	5:24:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:24:04 PM	Helium valve closed
2/13/2010	5:24:04 PM	H2 valve closed
2/13/2010	5:24:04 PM	BCl3 valve closed
2/13/2010	5:24:04 PM	PH3 valve closed
2/13/2010	5:24:04 PM	SiCl4 pre valve closed
2/13/2010	5:24:04 PM	SiCl4 post valve closed
2/13/2010	5:24:04 PM	Main Vac valve closed
2/13/2010	5:24:04 PM	Bubbler valve closed
2/13/2010	5:24:04 PM	Bypass valve opened
2/13/2010	5:24:04 PM	Helium MFC set to  0.000000
2/13/2010	5:24:04 PM	H2 MFC set to  0.000000
2/13/2010	5:24:04 PM	BCl3 MFC set to  0.000000
2/13/2010	5:24:04 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:24:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:24:04 PM	Tube furnace set to 0
2/13/2010	5:24:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:24:32 PM	Helium valve closed
2/13/2010	5:24:32 PM	H2 valve closed
2/13/2010	5:24:32 PM	BCl3 valve closed
2/13/2010	5:24:32 PM	PH3 valve closed
2/13/2010	5:24:32 PM	SiCl4 pre valve closed
2/13/2010	5:24:32 PM	SiCl4 post valve closed
2/13/2010	5:24:32 PM	Bubbler valve closed
2/13/2010	5:24:32 PM	Main Vac valve opened
2/13/2010	5:24:32 PM	Bypass valve opened
2/13/2010	5:24:32 PM	Helium MFC set to  0.000000
2/13/2010	5:24:32 PM	H2 MFC set to  0.000000
2/13/2010	5:24:32 PM	BCl3 MFC set to  0.000000
2/13/2010	5:24:32 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:24:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:24:32 PM	Tube furnace set to 0
2/13/2010	5:24:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:24:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:24:43 PM	Helium MFC set to  100.000000
2/13/2010	5:24:45 PM	Helium valve opened
2/13/2010	5:25:09 PM	Helium valve closed
2/13/2010	5:25:56 PM	Bypass valve closed
2/13/2010	5:25:57 PM	Main Vac valve closed
2/13/2010	5:26:02 PM	Bypass valve opened
2/13/2010	5:26:03 PM	Main Vac valve opened
2/13/2010	5:28:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	5:28:18 PM	H2 valve closed
2/13/2010	5:28:18 PM	BCl3 valve closed
2/13/2010	5:28:18 PM	PH3 valve closed
2/13/2010	5:28:18 PM	SiCl4 pre valve closed
2/13/2010	5:28:18 PM	SiCl4 post valve closed
2/13/2010	5:28:18 PM	Main Vac valve closed
2/13/2010	5:28:18 PM	Bypass valve closed
2/13/2010	5:28:18 PM	Bubbler valve closed
2/13/2010	5:28:18 PM	Helium valve opened
2/13/2010	5:28:18 PM	Helium MFC set to  500.000000
2/13/2010	5:28:18 PM	H2 MFC set to  0.000000
2/13/2010	5:28:18 PM	BCl3 MFC set to  0.000000
2/13/2010	5:28:18 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:28:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:28:18 PM	Tube furnace set to 0
2/13/2010	5:28:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:30:14 PM	Program started after a nonstandard shutdown
2/13/2010	5:30:14 PM	Helium valve closed
2/13/2010	5:30:14 PM	H2 valve closed
2/13/2010	5:30:14 PM	BCl3 valve closed
2/13/2010	5:30:14 PM	PH3 valve closed
2/13/2010	5:30:14 PM	SiCl4 pre valve closed
2/13/2010	5:30:14 PM	SiCl4 post valve closed
2/13/2010	5:30:14 PM	Main Vac valve closed
2/13/2010	5:30:14 PM	Bypass valve closed
2/13/2010	5:30:14 PM	Bubbler valve closed
2/13/2010	5:30:14 PM	Helium MFC set to  0.000000
2/13/2010	5:30:14 PM	H2 MFC set to  0.000000
2/13/2010	5:30:14 PM	BCl3 MFC set to  0.000000
2/13/2010	5:30:14 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:30:14 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	5:30:14 PM	Tube furnace set to 0
2/13/2010	5:30:14 PM	Bypass solenoid MFC set to  760.000000
2/13/2010	5:30:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:30:49 PM	Helium valve closed
2/13/2010	5:30:49 PM	H2 valve closed
2/13/2010	5:30:49 PM	BCl3 valve closed
2/13/2010	5:30:49 PM	PH3 valve closed
2/13/2010	5:30:49 PM	SiCl4 pre valve closed
2/13/2010	5:30:49 PM	SiCl4 post valve closed
2/13/2010	5:30:49 PM	Main Vac valve closed
2/13/2010	5:30:49 PM	Bubbler valve closed
2/13/2010	5:30:49 PM	Bypass valve opened
2/13/2010	5:30:49 PM	Helium MFC set to  0.000000
2/13/2010	5:30:49 PM	H2 MFC set to  0.000000
2/13/2010	5:30:49 PM	BCl3 MFC set to  0.000000
2/13/2010	5:30:49 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:30:49 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:30:49 PM	Tube furnace set to 0
2/13/2010	5:30:49 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:31:03 PM	Helium valve closed
2/13/2010	5:31:03 PM	H2 valve closed
2/13/2010	5:31:03 PM	BCl3 valve closed
2/13/2010	5:31:03 PM	PH3 valve closed
2/13/2010	5:31:03 PM	SiCl4 pre valve closed
2/13/2010	5:31:03 PM	SiCl4 post valve closed
2/13/2010	5:31:03 PM	Bubbler valve closed
2/13/2010	5:31:03 PM	Main Vac valve opened
2/13/2010	5:31:03 PM	Bypass valve opened
2/13/2010	5:31:03 PM	Helium MFC set to  0.000000
2/13/2010	5:31:03 PM	H2 MFC set to  0.000000
2/13/2010	5:31:03 PM	BCl3 MFC set to  0.000000
2/13/2010	5:31:03 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:31:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:31:03 PM	Tube furnace set to 0
2/13/2010	5:31:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:31:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:33:03 PM	Bypass valve closed
2/13/2010	5:33:04 PM	Main Vac valve closed
2/13/2010	5:33:31 PM	Bypass valve opened
2/13/2010	5:33:32 PM	Main Vac valve opened
2/13/2010	5:37:34 PM	Bypass valve closed
2/13/2010	5:37:35 PM	Main Vac valve closed
2/13/2010	5:38:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:38:59 PM	Helium valve closed
2/13/2010	5:38:59 PM	H2 valve closed
2/13/2010	5:38:59 PM	BCl3 valve closed
2/13/2010	5:38:59 PM	PH3 valve closed
2/13/2010	5:38:59 PM	SiCl4 pre valve closed
2/13/2010	5:38:59 PM	SiCl4 post valve closed
2/13/2010	5:38:59 PM	Main Vac valve closed
2/13/2010	5:38:59 PM	Bubbler valve closed
2/13/2010	5:38:59 PM	Bypass valve opened
2/13/2010	5:38:59 PM	Helium MFC set to  0.000000
2/13/2010	5:38:59 PM	H2 MFC set to  0.000000
2/13/2010	5:38:59 PM	BCl3 MFC set to  0.000000
2/13/2010	5:38:59 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:38:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:38:59 PM	Tube furnace set to 0
2/13/2010	5:38:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:39:31 PM	Helium valve closed
2/13/2010	5:39:31 PM	H2 valve closed
2/13/2010	5:39:31 PM	BCl3 valve closed
2/13/2010	5:39:31 PM	PH3 valve closed
2/13/2010	5:39:31 PM	SiCl4 pre valve closed
2/13/2010	5:39:31 PM	SiCl4 post valve closed
2/13/2010	5:39:32 PM	Bubbler valve closed
2/13/2010	5:39:32 PM	Main Vac valve opened
2/13/2010	5:39:32 PM	Bypass valve opened
2/13/2010	5:39:32 PM	Helium MFC set to  0.000000
2/13/2010	5:39:32 PM	H2 MFC set to  0.000000
2/13/2010	5:39:32 PM	BCl3 MFC set to  0.000000
2/13/2010	5:39:32 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:39:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:39:32 PM	Tube furnace set to 0
2/13/2010	5:39:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:39:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	5:40:37 PM	Helium valve opened
2/13/2010	5:40:40 PM	Helium MFC set to  100.000000
2/13/2010	5:42:28 PM	Helium valve closed
2/13/2010	5:43:01 PM	Helium valve opened
2/13/2010	5:50:10 PM	Helium MFC set to  0.000000
2/13/2010	5:50:10 PM	Helium valve closed
2/13/2010	5:51:28 PM	Bypass valve closed
2/13/2010	5:51:29 PM	Main Vac valve closed
2/13/2010	5:52:03 PM	Bypass valve opened
2/13/2010	5:52:03 PM	Main Vac valve opened
2/13/2010	5:57:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	5:57:54 PM	H2 valve closed
2/13/2010	5:57:54 PM	BCl3 valve closed
2/13/2010	5:57:54 PM	PH3 valve closed
2/13/2010	5:57:54 PM	SiCl4 pre valve closed
2/13/2010	5:57:54 PM	SiCl4 post valve closed
2/13/2010	5:57:54 PM	Main Vac valve closed
2/13/2010	5:57:54 PM	Bypass valve closed
2/13/2010	5:57:54 PM	Bubbler valve closed
2/13/2010	5:57:54 PM	Helium valve opened
2/13/2010	5:57:54 PM	Helium MFC set to  500.000000
2/13/2010	5:57:54 PM	H2 MFC set to  0.000000
2/13/2010	5:57:54 PM	BCl3 MFC set to  0.000000
2/13/2010	5:57:54 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:57:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:57:54 PM	Tube furnace set to 0
2/13/2010	5:57:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:59:17 PM	Helium valve closed
2/13/2010	5:59:17 PM	H2 valve closed
2/13/2010	5:59:17 PM	BCl3 valve closed
2/13/2010	5:59:17 PM	PH3 valve closed
2/13/2010	5:59:17 PM	SiCl4 pre valve closed
2/13/2010	5:59:17 PM	SiCl4 post valve closed
2/13/2010	5:59:17 PM	Main Vac valve closed
2/13/2010	5:59:17 PM	Bypass valve closed
2/13/2010	5:59:17 PM	Bubbler valve closed
2/13/2010	5:59:17 PM	Helium MFC set to  0.000000
2/13/2010	5:59:17 PM	H2 MFC set to  0.000000
2/13/2010	5:59:17 PM	BCl3 MFC set to  0.000000
2/13/2010	5:59:17 PM	SiCl4 MFC set to  0.000000
2/13/2010	5:59:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:59:17 PM	Tube furnace set to 0
2/13/2010	5:59:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	5:59:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	6:00:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:00:26 PM	Helium valve closed
2/13/2010	6:00:26 PM	H2 valve closed
2/13/2010	6:00:26 PM	BCl3 valve closed
2/13/2010	6:00:26 PM	PH3 valve closed
2/13/2010	6:00:26 PM	SiCl4 pre valve closed
2/13/2010	6:00:26 PM	SiCl4 post valve closed
2/13/2010	6:00:26 PM	Main Vac valve closed
2/13/2010	6:00:26 PM	Bubbler valve closed
2/13/2010	6:00:26 PM	Bypass valve opened
2/13/2010	6:00:26 PM	Helium MFC set to  0.000000
2/13/2010	6:00:26 PM	H2 MFC set to  0.000000
2/13/2010	6:00:26 PM	BCl3 MFC set to  0.000000
2/13/2010	6:00:26 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:00:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:00:26 PM	Tube furnace set to 0
2/13/2010	6:00:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:00:40 PM	Helium valve closed
2/13/2010	6:00:40 PM	H2 valve closed
2/13/2010	6:00:40 PM	BCl3 valve closed
2/13/2010	6:00:40 PM	PH3 valve closed
2/13/2010	6:00:40 PM	SiCl4 pre valve closed
2/13/2010	6:00:40 PM	SiCl4 post valve closed
2/13/2010	6:00:40 PM	Bubbler valve closed
2/13/2010	6:00:40 PM	Main Vac valve opened
2/13/2010	6:00:40 PM	Bypass valve opened
2/13/2010	6:00:40 PM	Helium MFC set to  0.000000
2/13/2010	6:00:40 PM	H2 MFC set to  0.000000
2/13/2010	6:00:40 PM	BCl3 MFC set to  0.000000
2/13/2010	6:00:40 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:00:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:00:40 PM	Tube furnace set to 0
2/13/2010	6:00:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:00:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:01:38 PM	Bypass valve closed
2/13/2010	6:01:38 PM	Main Vac valve closed
2/13/2010	6:02:21 PM	Bypass valve opened
2/13/2010	6:02:21 PM	Main Vac valve opened
2/13/2010	6:04:03 PM	Bypass valve closed
2/13/2010	6:04:03 PM	Main Vac valve closed
2/13/2010	6:04:22 PM	Bypass valve opened
2/13/2010	6:04:23 PM	Main Vac valve opened
2/13/2010	6:04:47 PM	Bypass valve closed
2/13/2010	6:04:48 PM	Main Vac valve closed
2/13/2010	6:05:25 PM	Bypass valve opened
2/13/2010	6:05:25 PM	Main Vac valve opened
2/13/2010	6:06:13 PM	Bypass valve closed
2/13/2010	6:06:14 PM	Main Vac valve closed
2/13/2010	6:08:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:08:01 PM	Helium valve closed
2/13/2010	6:08:01 PM	H2 valve closed
2/13/2010	6:08:01 PM	BCl3 valve closed
2/13/2010	6:08:01 PM	PH3 valve closed
2/13/2010	6:08:01 PM	SiCl4 pre valve closed
2/13/2010	6:08:01 PM	SiCl4 post valve closed
2/13/2010	6:08:01 PM	Main Vac valve closed
2/13/2010	6:08:01 PM	Bubbler valve closed
2/13/2010	6:08:01 PM	Bypass valve opened
2/13/2010	6:08:01 PM	Helium MFC set to  0.000000
2/13/2010	6:08:01 PM	H2 MFC set to  0.000000
2/13/2010	6:08:01 PM	BCl3 MFC set to  0.000000
2/13/2010	6:08:01 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:08:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:08:01 PM	Tube furnace set to 0
2/13/2010	6:08:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:08:33 PM	Helium valve closed
2/13/2010	6:08:33 PM	H2 valve closed
2/13/2010	6:08:33 PM	BCl3 valve closed
2/13/2010	6:08:33 PM	PH3 valve closed
2/13/2010	6:08:33 PM	SiCl4 pre valve closed
2/13/2010	6:08:33 PM	SiCl4 post valve closed
2/13/2010	6:08:33 PM	Bubbler valve closed
2/13/2010	6:08:33 PM	Main Vac valve opened
2/13/2010	6:08:33 PM	Bypass valve opened
2/13/2010	6:08:33 PM	Helium MFC set to  0.000000
2/13/2010	6:08:33 PM	H2 MFC set to  0.000000
2/13/2010	6:08:33 PM	BCl3 MFC set to  0.000000
2/13/2010	6:08:33 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:08:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:08:33 PM	Tube furnace set to 0
2/13/2010	6:08:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:08:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:08:43 PM	Helium valve opened
2/13/2010	6:08:51 PM	Helium MFC set to  100.000000
2/13/2010	6:10:06 PM	Helium valve closed
2/13/2010	6:10:54 PM	Bypass valve closed
2/13/2010	6:10:54 PM	Main Vac valve closed
2/13/2010	6:11:11 PM	Bypass valve opened
2/13/2010	6:11:11 PM	Main Vac valve opened
2/13/2010	6:12:36 PM	Bypass valve closed
2/13/2010	6:12:36 PM	Main Vac valve closed
2/13/2010	6:12:55 PM	Bypass valve opened
2/13/2010	6:12:56 PM	Main Vac valve opened
2/13/2010	6:13:51 PM	Bypass valve closed
2/13/2010	6:13:51 PM	Main Vac valve closed
2/13/2010	6:14:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	6:14:04 PM	H2 valve closed
2/13/2010	6:14:04 PM	BCl3 valve closed
2/13/2010	6:14:04 PM	PH3 valve closed
2/13/2010	6:14:04 PM	SiCl4 pre valve closed
2/13/2010	6:14:04 PM	SiCl4 post valve closed
2/13/2010	6:14:04 PM	Main Vac valve closed
2/13/2010	6:14:04 PM	Bypass valve closed
2/13/2010	6:14:04 PM	Bubbler valve closed
2/13/2010	6:14:04 PM	Helium valve opened
2/13/2010	6:14:04 PM	Helium MFC set to  500.000000
2/13/2010	6:14:04 PM	H2 MFC set to  0.000000
2/13/2010	6:14:04 PM	BCl3 MFC set to  0.000000
2/13/2010	6:14:04 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:14:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:14:04 PM	Tube furnace set to 0
2/13/2010	6:14:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:15:26 PM	Helium valve closed
2/13/2010	6:15:26 PM	H2 valve closed
2/13/2010	6:15:26 PM	BCl3 valve closed
2/13/2010	6:15:26 PM	PH3 valve closed
2/13/2010	6:15:26 PM	SiCl4 pre valve closed
2/13/2010	6:15:26 PM	SiCl4 post valve closed
2/13/2010	6:15:26 PM	Main Vac valve closed
2/13/2010	6:15:26 PM	Bypass valve closed
2/13/2010	6:15:26 PM	Bubbler valve closed
2/13/2010	6:15:26 PM	Helium MFC set to  0.000000
2/13/2010	6:15:26 PM	H2 MFC set to  0.000000
2/13/2010	6:15:26 PM	BCl3 MFC set to  0.000000
2/13/2010	6:15:26 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:15:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:15:26 PM	Tube furnace set to 0
2/13/2010	6:15:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:15:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2010	6:21:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:21:34 PM	Helium valve closed
2/13/2010	6:21:34 PM	H2 valve closed
2/13/2010	6:21:34 PM	BCl3 valve closed
2/13/2010	6:21:34 PM	PH3 valve closed
2/13/2010	6:21:34 PM	SiCl4 pre valve closed
2/13/2010	6:21:34 PM	SiCl4 post valve closed
2/13/2010	6:21:34 PM	Main Vac valve closed
2/13/2010	6:21:34 PM	Bubbler valve closed
2/13/2010	6:21:34 PM	Bypass valve opened
2/13/2010	6:21:34 PM	Helium MFC set to  0.000000
2/13/2010	6:21:34 PM	H2 MFC set to  0.000000
2/13/2010	6:21:34 PM	BCl3 MFC set to  0.000000
2/13/2010	6:21:34 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:21:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:21:34 PM	Tube furnace set to 0
2/13/2010	6:21:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:22:03 PM	Helium valve closed
2/13/2010	6:22:03 PM	H2 valve closed
2/13/2010	6:22:03 PM	BCl3 valve closed
2/13/2010	6:22:03 PM	PH3 valve closed
2/13/2010	6:22:03 PM	SiCl4 pre valve closed
2/13/2010	6:22:03 PM	SiCl4 post valve closed
2/13/2010	6:22:03 PM	Bubbler valve closed
2/13/2010	6:22:03 PM	Main Vac valve opened
2/13/2010	6:22:03 PM	Bypass valve opened
2/13/2010	6:22:03 PM	Helium MFC set to  0.000000
2/13/2010	6:22:03 PM	H2 MFC set to  0.000000
2/13/2010	6:22:03 PM	BCl3 MFC set to  0.000000
2/13/2010	6:22:03 PM	SiCl4 MFC set to  0.000000
2/13/2010	6:22:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:22:03 PM	Tube furnace set to 0
2/13/2010	6:22:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2010	6:22:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2010	6:22:42 PM	Bypass valve closed
2/13/2010	6:22:43 PM	Main Vac valve closed
2/13/2010	6:22:53 PM	Bypass valve opened
2/13/2010	6:22:53 PM	Main Vac valve opened
2/13/2010	6:23:34 PM	Helium valve opened
2/13/2010	6:23:38 PM	Helium MFC set to  100.000000
2/13/2010	6:24:09 PM	Helium valve closed
2/13/2010	6:25:27 PM	Bypass valve closed
2/13/2010	6:25:27 PM	Main Vac valve closed
2/13/2010	6:25:32 PM	Main Vac valve opened
2/13/2010	6:25:33 PM	Bypass valve opened
